Amat Chamber Set Interface Board

說明: 0015-00421

I/O Expansion Board

說明:0090-00224

Sbc Board(V452)

說明: 0090-76133、0090-03467

Stepper Driver Board

說明: 0100-00003

TC Gauge Board

說明: 0100-00008

Chopper Drive Board

說明: 0100-00011、0100-00060

Sense Amp Board

說明: 0100-00192

Chamber Interconnect Board

說明: 0100-00245

Analog I/O Board

說明:0100-00396

Interface Board

說明: 0100-00493、0100-18025 、 0100-01321

VGA Video Controller Board

說明: 0100-00793、0190-76050 0190-130650190-70102 0190-00318 、 0190-75084

Digital I/O Board

說明: 0100-00493、0100-18025

Pneumatic Control Board

說明: 0100-09008

HT Exch Intfc Board

說明: 0100-09041

Analog Input Board

說明: 0100-09054

0100-09056、0100-09006 Cenerfinder.SBC.Assy

說明: 0100-09056 、0100-09006

N2-Dryvac Distribution Board

說明: 0100-09081

P5000 DI/DO Board

說明: 0100-11002

System Electronics Interface board

說明: 0100-20001、0100-01996、0100-00398 0100-20001

TC Gauge Board

說明: 0100-20063 、 0100-00893

Analog Sync Detect Board

說明: 0100-20066

Wafer Orienter Board

說明: 0100-20069

Analog I/O Board

說明: 0100-20100

Interconnect Board

說明: 0100-35082

Seriplex I/O Distribution Board

說明: 0100-35124、0100-35231

E Chuck Controller Board

說明: 0100-38032、0100-02397 、 0100-35227

Interface Processor Dist Board

說明: 0100-76017

Center Finder Control Board

說明: 0100-76042

Serial/Video Dist Board

說明: 0100-76083、0100-13025

Centerfinder Board

說明: 0100-76088 Centerfinder Board

Digital I/O Board

說明:0100-76124、0100-20003

Wafer Orienter Board

說明:0100-76259

Exch Emax Interlock Module

說明: 0190-01544

Mainframe Interlock 2Relays

說明: 0190-02363

Sbc Board (V21)

說明: 0190-09379、0190-20048

Seriplex Mux ADI/O

說明: 0190-09690

Gas Panel Seriplex Pcb

說明: 0190-35762

Seriplex Sensor Apc Board

說明: 0190-35775

Common GP I/O Dist Board

說明: 0190-36715

Chamber Interface Board

說明: 0100-35054

Analog I/O Board

說明: 0100-00825

Bay Voltex Chiller

說明: HT-1650-WC-G

Chamber Interface Board

說明: 0100-35054

PCB Serial Isolator Assy

說明: 0100-35065、0130-35065

Smoke/Water Leak Detect Board

說明: 0130-20177

PCB Assy, Wafer Detector

說明: 0100-20073