Vexta 5 Phase Driver

說明 : 0870-01002
Model:UDX5114N


8″RTP Window

說明 : 0200-35222

0190-17311 Flashlamp Eyed-IEP Poly DpsII Centura

說明 : 0190-17311
300459-3306-0633153 Model: FL2004

0190-19024 RF Match AE Navigator

說明 : 0190-19024 M/N:3155126-020

0190-27579 H/A Chamber Right Side BU

說明 : 0190-27579 M/N:3155132-004

0190-31707 Vhp Hub Bearing

說明 : BRG,4PT CONT,8.625OD X 8ID X .3125W W/CA

1110-00056-000 AE Advanced Energy RF Match

說明 : 1110-00056-000 M/N:3155031-037

1350-00239 Intergrated Flow Controller

說明 : Model: 6500-T2-F02-H04-M-P2-U1 1350-00239 IFC, 0-250Mlpm, 1/4FL, 14 Pin, Cable

FLASHLAMP EYED-IEP

說明 :
1400-00205 /0190-17310/0010-25596
Spectrograph, SD1024D-2-S, I/O, 24VDC FL2004

3870-04843 Digital Flow SW Integ Sensor

說明 : 3870-04843 PF2W720T-04-27

Hoke Valve

說明 : 7387001S
100 PSIG SST CF8M (316)

24V Power Supply Assembly

說明 : 0010-20211 REV F

Amat Esc Assy, 200mm, Dual Zone, Emxp+

說明 : 0040-05592
0040-00876

RFG 3000

說明 : M/N: 3155038-005

Throttle Assy, Univ Direct Drive C-Plug

說明 : 0010-37151
5000/5200

Nsk Megatorque Controller

說明 : EP0810AF3-05

Blocker Plate

說明 : 0020-63185

Nsk Driver VHP Upper Motor Control

說明 : 0190-75052
TYPE:ESA-B014CF7-11

NSK Driver, VHP Lower Motor Control

說明 : 0190-75053
TYPE:ESA-B014CF8-11

Cable Assy, Auto bias Power

說明 : 0150-36349

Carrier 5200 Mxp ESC Poly

說明 : 0020-38967

P5000 Robot Blade

說明 : 0010-02905

Cover Slit

說明 : 0021-27883

CVD Chamber Susceptor Lift Assembly

說明 :
0010-09179
0010-09549
0010-09180
0010-10188
0010-09180
0010-09837

DC Power Supply 800W Etch 300MM 100948-03

說明 : 0190-16537
100948-03

DPS Metal Ceramic Base

說明 : 0200-35287

Drive Assy Swill Indexer

說明 : 0010-26315

Facepi ATE SIN XG DXZ DCVD

說明 : 0021-00041

RFG 2000

說明 : 3155053-007

Nsk Megatorque Motor

說明 : SSB014FN517

Flange Insulation Unibodt Etch

說明 : 0020-31886

Edge Ring, TXZ

說明 : 0021-35946

Cable Assy, CCD BD INT.

說明 : 0150-20103

Hp Robot Driver

說明 : 0010-70264

Granville-Phillips 360/370 Stabil-Ion Gauge

說明 : Granville-Phillips 360/370 Stabil-Ion Gauge

Type: EXT-T
(Part Number:360190)

H/A Autobias Interconnect

說明 : 0140-01340

Housing GDP ASP-300MM

說明 : 0021-11929

Integrated Controller Compi

說明 : 0190-26859

KIT Actuator

說明 : 0190-03234

Super E Cathode Liner

說明 : 0040-02609

Liner, Wall MXP+ Oxide

說明 : 0040-33998

Wtm Short Fiber For HDP

說明 : 0620-01755

Novellus Door Seal.

說明: 22-10292-00

Upper Chamber (Poly)

說明:0020-33806

Single Ring

說明 : 0200-05959

Ring Insulator Stepped Producer

說明: 0200-02542

Advanced Energy MDX-L12M

說明 : 0190-76191

Advanced Energy MDX-L12M-650

說明: 0190-76192

RF Match

說明 : 0010-21748W

ASSY +/- 15V Power Supply

說明: 0010-20498

Ring Locking

說明 : 3980-00007

L-Door 300MM Corrosion Res

說明 : 0010-27198

Water Cooled STD PVD 300MM

說明:0040-87046

Lamp Driver

說明 : 0190-09560
Model: P1140
180-230 VAC, 1 Phase, 50/60 HZ, 20 AMP MAX

Heater Driver

說明: 0190-09419
Model: P1136
180-230 VAC, 1 Phase, 50/60 HZ, 20 AMP MAX

Magnet Driver

說明 : 0190-36315
1000-0115-00
Fuse:1/2A, 250VAC
Input:208VAC,3Φ,4KVA,50~60Hz
Output:0~300V, 14A (4 Channels)

Lamp Driver

說明: 0190-09573
208 VAC 3 PHASE
50/60 HZ 50 AMP


Magnet Driver

說明 : 0190-70060
0190-02703
1100-0051-00
FUSE:1/2A, 250VAC

Lamp Driver

說明 : 0190-35302

180-230 VAC 3 Phase
50/60 HZ 20 AMP

Shell Assy Cip

說明 : 0041-11052

ESC Chuck 200mm

說明: 0040-09961
    0040-09957

Window, Quartz, 5MM

說明 : 0200-01623

Liner Lower Asp-300

說明: 0200-00762

RF Match
AE Navigator
(300MM)

說明: 0190-15206-002
M/N:3155168-001

Single Ring

說明 : 0200-05001-003

Sling Assy Chamber Body Lift Tool

說明:0270-01906

Vat Gate Compl

說明 : 0190-12806
VAT P/N:237789

Vat Gate Compl Ultic Armor Seal

說明: VAT P/N:227751

Buffer I/O Board

說明 :0100-09009

Opto Detect Board

說明: 0100-00014

HBL2721
30A 3Φ 250VAC

說明 : HBL2721

HBL2723

說明: HBL2723

Bracket Lift HDP CVD

說明 : 0020-18356

Cable For WTM

說明 : 0190-00334

Cable For WTM

說明 : 0620-02688

VAT
Slit Valve

說明 : 0300X-CA24-ALL 1

Robot Tube

說明:0040-75902

SBC BOARD(V452)

說明 : 0090-76133
0090-03467

SBC BOARD (V440)

說明:0190-75015
0190-76043
0090-76109

Chamber Interconnect Board

說明 : 0130-00246、0100-00246

Cable Assy, MOTOR/ENCODER

說明: 0150-11367

Pcb Assy, Chamber Tray Ultima

說明: 0100-18062

EP VGA I/O Intercomect

說明: 0100-18062
0100-70034

DIO Fuse Board

說明:0100-09117

Analog I/O Board
(AI/O BD)

說明:0190-22967

Gas Distribution Board

說明:0100-35107

Smif-Asyst Wide Body W/Testing

說明:0100-16009

Analog Output Board

說明:0100-11001

Amat Centural DPS ⅡHV

說明:0190-70110

HV Module MXP

說明:0010-10901

Amat Centural DPS ⅡHV

說明:0010-04926

HV MODULE DPS

說明:0010-30139

Centura I/O Backplate

說明:0100-00565

SBS CPM1 PMC-Video PCB

說明:0190-17952

Diamond Speedstar Pro Board

說明:FTUISA5426A

Mainframe Interface Relays Board

說明:
0190-02362
0130-02362

Mainframe Interlock 2Relays

說明:
0190-02363
0130-02363

Slit Liner Buffer Kit

說明:0020-19003